INVITED: MEASUREMENT OF NITROGEN CONTENTRATION IN CZ SILICON
- Author(s):
- Publication title:
- Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2002-2
- Pub. Year:
- 2002
- Page(from):
- 875
- Page(to):
- 888
- Pages:
- 14
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773744 [1566773741]
- Language:
- English
- Call no.:
- E23400/2002-2
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
Electrochemical Society |
2
Conference Proceedings
Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society, SPIE-The International Society for Optical Engineering |
Electrochemical Society |
11
Conference Proceedings
Behavior of Point Defects in CZ Silicon Crystal Growth - Formation of Polyhedral Cavities and Oxidation-Induced Stacking Fault Nuclei
MRS - Materials Research Society |
6
Conference Proceedings
Standardization of Nitrogen Analysis in CZ-Si by Charged Particle Activation Analysis
Electrochemical Society |
12
Conference Proceedings
Measurement of Nitrogen Concentration in CZ-Si below 1014/cm3 by IR Absorption Spectroscopy
Electrochemical Society |