Metal contamination issues resulting from new Si processes

Metal contamination issues resulting from new Si processes

Author(s):

Benton, J. L.

Publication title:

Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2001-29

Pub. Year:

2001

Page(from):

181

Page(to):

191

Pages:

11

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773638 [1566773636]

Language:

English

Call no.:

E23400/200129

Type:

Conference Proceedings

Details

TDL ID:	ZA00014033
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Crystalline Defects and Contamination - DECON ; European Solid State Device Research Conference - ESSDERC
Conf. info. (Number):	3rd (2001) ; 31st (2001)
Conf. info. (Venue):	Nuremberg, Germany
Conf. info. (Date):	2001.09.11-2001.09.13

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