Electrical characterization of thin SOI wafer
- Author(s):
- Publication title:
- Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-29
- Pub. Year:
- 2001
- Page(from):
- 143
- Page(to):
- 152
- Pages:
- 10
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773638 [1566773636]
- Language:
- English
- Call no.:
- E23400/200129
- Type:
- Conference Proceedings
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