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Control of grown-in defects in nitrogen-doped CZ silicon crystal for new generation devices

Author(s):
Hourai, M.
Ono, T.
Umeno, S.
Tanaka, T.
Asayaoia, E.
Nishikawa, H.
Sano, M.
Tsuya, H.
3 more
Publication title:
Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-29
Pub. date:
2001
Page(from):
19
Page(to):
34
Pages:
16
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773638 [1566773636]
Language:
English
Call no.:
E23400/200129
Type:
Conference Proceedings

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