A Si/SiO2/Si Heteroatructure Barrier Varactor Diode Made by Wafer Bonding

A Si/SiO2/Si Heteroatructure Barrier Varactor Diode Made by Wafer Bonding

Author(s):: Bengtsson, S.
Publication title:: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 2001-27
Pub. Year:: 2001
Page(from):: 205
Page(to):: 213
Pages:: 9
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566773607 [1566773601]
Language:: English
Call no.:: E23400/200127
Type:: Conference Proceedings

Details

TDL ID:	ZA00014031
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Semiconductor Wafer Bonding ; Fall Meeting of the Electrochemical Society
Conf. info. (Number):	6th ; 2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.09.00

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