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Bonding Strength and Electrical Characteristics of Si/Si, Si/InP and Si/GaAs Interfaces Bonded by Surface Activated Bonding at Room Temperature: Influences of Sputtering Time and Energy

Author(s):
Publication title:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-27
Pub. Year:
2001
Page(from):
41
Page(to):
47
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773607 [1566773601]
Language:
English
Call no.:
E23400/200127
Type:
Conference Proceedings

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