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GAS-PHASE SURFACE CONDITIONING IN A HIGH-k GATE CLUSTER

Author(s):
Roman, P.
Lee, D.-O.
Wang, J.
Wu, C.-T.
Subramanian, V.
Brubaker, M.
Mumbauer, P.
Grant, R.
Ruzyllo, J.
4 more
Publication title:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-26
Pub. date:
2001
Page(from):
241
Page(to):
248
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
Language:
English
Call no.:
E23400/200126
Type:
Conference Proceedings

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