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OPTIMIZATION OF A BRUSH SCRUBBER FOR NANO-SIZED PARTICLES

Author(s):
Xu, K.
Vos, R.
Arnauts, S.
Lux, M.
Schaetzlein, W.
Speh, U.
Mertens, P.
Heyns, M.
Vinckier, C.
4 more
Publication title:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-26
Pub. Year:
2001
Page(from):
187
Page(to):
194
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
Language:
English
Call no.:
E23400/200126
Type:
Conference Proceedings

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