Blank Cover Image

EFFECT OF WAFER BACKSIDE ON PARTICLE ADDITION BEHAVIOUR OF HF-RCA SEQUENCE

Author(s):
Publication title:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-26
Pub. date:
2001
Page(from):
172
Page(to):
179
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
Language:
English
Call no.:
E23400/200126
Type:
Conference Proceedings

Similar Items:

Lodi, D., Bellandi, E., Ninni, R.

Electrochemical Society

Wolke, K., Schenkl, M., Alessandri, M., Bellandi, E.

Electrochemical Society

Bellandi, E., Alessandri, M., Lodi, D., Strada, M., Pipia, S., Petitdidier, S., Levy, D.

Electrochemical Society

Bellandi, E., Crivelli, B., Elbaz, A., Alessandri, M., Boher, P., Defranoux, C.

SPIE-The International Society for Optical Engineering

3 Conference Proceedings THE ST CLEAN DUAL STEP CLEANING CONCEPT

Bellandi, R., Alessandri, M., Lodi, D., Pipia, F.

Electrochemical Society

Bellandi, E., Crivelli, B., Elbaz, A., Alessandri, M., Boher, P., Defranoux, C.

Electrochemical Society

Alessandri, M., Bellandi, E., Pipia, F., Crivelli, B., Wolke, K., Schenkl, M.

Electrochemical Society

Balasubramanian, N., Roy, M-M., Dow, F.P., Pauline, H.G.

Electrochemical Society

A. Votta, E. Bellandi, M. Alessandri, A. Vedda, A. Ferretti

Electrochemical Society

Balasubramanian, N., Roy, M-M., Pauline, H.G., Dow, F. P.

Electrochemical Society

Bellandi, E., Alessandri, M., Tonti, A., Pipia, F., Wolke, K., Schenkl, M., Geomini, M., Kwakman, L.F.T.

Electrochemical Society

Cui, L., Wang, X., Qi, M., Yang, D.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12