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SUB 1OOnm PARTICLE REMOVAL WITH DEIONIZED WATER AND A MEGASONIC FREQUENCY OF 835kHz

Author(s):
Lauerhaas, J.
Wu, Y.
Xu, K.
Vereecke, G.
Vos, R.
Kenis, K.
Mertens, P.
Nicolosi, T.
Heyns, M.
4 more
Publication title:
Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-26
Pub. date:
2001
Page(from):
147
Page(to):
155
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773591 [1566773598]
Language:
English
Call no.:
E23400/200126
Type:
Conference Proceedings

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