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Microwave Plasma Deposition of CVD Diamond Films for MEMS Applications

Author(s):
Publication title:
Diamond materials VII : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-25
Pub. date:
2001
Page(from):
252
Page(to):
263
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773584 [156677358X]
Language:
English
Call no.:
E23400/200125
Type:
Conference Proceedings

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