Blank Cover Image

Suppression of Plasma Charging Damage in Sub Micron Metal-Oxide-Scmiconductor Field-Effect Transistors (MOSFETS) with Gate Oxynitride by Two-Step Nitridation

Author(s):
Publication title:
Thin film materials, processes, and reliability : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-24
Pub. date:
2001
Page(from):
8
Page(to):
13
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773577 [1566773571]
Language:
English
Call no.:
E23400/200124
Type:
Conference Proceedings

Similar Items:

Chang-Liao, K.-S., Tzeng, P.-J.

Electrochemical Society

Krug, C., Baumvol, I.J.R., Stedile, F.C., Green, M.L., Klemens, F., Silverman, P.J., Sorsch, T.W., Alvarez, F., Hammer, …

Electrochemical Society

K.-S. Chang-Liao, P.-J. Tzeng

Electrochemical Society

Ren, F., Pearton, S.J., Abernathy, C.R., Baca, A.G., Cheng, P., Han, J., Shul, R.J., Chu, S.N.G., Hong, M., Lothian, …

Electrochemical Society

Ren, F., Lothian, J. R., Chen, Y. K., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Vartuli, C. B., Lee, J. W., …

MRS - Materials Research Society

Kraus, P.A., Chua, T.C., Rothschild, A., Cubaynes, F.N, Veloso, A., Mertens, S., Date, L., Baue, T.M., Ahmed, K.Z., …

Electrochemical Society

Yao, Z.-Q., Ghodsi, R., Harrison, H.B., Dimitrijev, S., Yeow, T.Y.

Electrochemical Society

Jones, K.W., Mitra, A.K., Ramsey, J.

Society of Automotive Engineers

Heo, Young-Woo, Kang, B. S., Tien, L. C., Kwon, Y., La-Roche, J. R., Gila, B. P., Ren, F., Pearton, S. J., Norton, D. P.

Materials Research Society

Johnson, J.W., Gila, B.P., Luo, B., Lee, K.P., Abernathy, C.R., Pearton, S.J., Chyi, J.I., Nee, T.E., Lee, C.M., Chuo, …

Electrochemical Society

Abernathy, C.R., Gila, B.P., Onstine, A.H., Pearton, S.J., Kim, J., Luo, B., Mehandru, R., Ran, F., Gillespie, J.K., …

Electrochemical Society

M. Tsujimura, H. Kitai, H. Shiomi, K. Kojima, K. Fukuda

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12