Development of Wide Range EIS Capacitor pH Sensor Using Corrosion Resistant Al2O3-Ta2O5 and Al2O3-ZrO2 Thin Films as Insulator Layers

Development of Wide Range EIS Capacitor pH Sensor Using Corrosion Resistant Al2O3-Ta2O5 and Al2O3-ZrO2 Thin Films as Insulator Layers

Author(s):

Publication title:

Corrosion and corrosion protection : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2001-22

Pub. Year:

2001

Page(from):

714

Page(to):

721

Pages:

8

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773553 [1566773555]

Language:

English

Call no.:

E23400/200122

Type:

Conference Proceedings

Details

TDL ID:	ZA00014026
Series ID:	PA00000028
Conf. info. (Name):	Corrosion Symposium of the Joint International Meeting of the Electrochemical Society and the International Society for Electrochemistry
Conf. info. (Number):	2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.09.02-2001.09.07

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