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Sub-Micron Gate FETs by Optical Lighography Using Reflow and SOG Method

Author(s):
Lour, W.S.
Tsai, M.K.
Chen, K.C.
Wu, Y.W.
Tan, S.W.
Yang, Y.J.
1 more
Publication title:
State-of-the-art-program on compound semiconductors (STAPOCS XXXV) : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-20
Pub. Year:
2001
Page(from):
154
Page(to):
157
Pages:
4
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773539 [1566773539]
Language:
English
Call no.:
E23400/200120
Type:
Conference Proceedings

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