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Electron Beam Induced Carbon Masking for Selective Porous Silicon for- mation

Author(s):
Publication title:
Quantum confinement VI: nanostructured materials and devices : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-19
Pub. Year:
2001
Page(from):
108
Page(to):
116
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773522 [1566773520]
Language:
English
Call no.:
E23400/200119
Type:
Conference Proceedings

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