Plasma Etching Of Ir And Pb(Zr,Ti)O3 Films For High-Density FeRAM Applications

Plasma Etching Of Ir And Pb(Zr,Ti)O3 Films For High-Density FeRAM Applications

Author(s):

Ying, Chris

Publication title:

Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2001-17

Pub. Year:

2001

Page(from):

583

Page(to):

588

Pages:

6

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773508 [1566773504]

Language:

English

Call no.:

E23400/200117

Type:

Conference Proceedings

Details

TDL ID:	ZA00014021
Series ID:	PA00000028
Conf. info. (Name):	International Conference on Semiconductor Technology - ISTC
Conf. info. (Number):	1st (2001)
Conf. info. (Venue):	Shanghai, China
Conf. info. (Date):	2001.05.27-2001.05.30

Similar Items:

1 Conference Proceedings Micro-Raman Study of Pb(Zr,Ti)O3 Thin Films in FERAM Kimura, T., Horii, Y., Nakamura, T., Honda, K. MRS - Materials Research Society	7 Conference Proceedings Preparation and Characterization of Pb(Zr,Ti)O3 Films on SrTiO3 Substrates Gong, W., Li, J. F., Chu, X., Li, L. Trans Tech Publications
2 Conference Proceedings Pb(Zr,Ti)O3 ceramic thick films for optical device applications Cardin, J., Leduc, D., Boisrobert, C., Gundel, H.W. SPIE-The International Society for Optical Engineering	8 Conference Proceedings High Temperature Plasma Etching of PZT Capacitor Stacks for High Density FERAMs Egger, Ulrich, Tomioka, Kazuhiro, Stojakovic, George, Taniguchi, Yasuyuku, Bruchhaus, Rainer, Zhuang, Haoren, Kanaya, … Materials Research Society
3 Conference Proceedings Manufacturability Study for Etching High-Density BST/Pt Capacitors Hwang, Jay Materials Research Society	9 Conference Proceedings PHOTOLUMINESCENCE INVESTIGATION OF Pb(Zr,Ti)O3 THIN FILMS Zurcher, P., Jones, R.P., Sun, Y., Cone, R.L. Materials Research Society
4 Conference Proceedings Retention Characteristics of Pb(Zr, Ti)O3 Films Deposited by Various Methods for High Density Non-Volatile Memory Shin, Sangmin, Hofmann, Mirko, Lee, Yong Kyun, Cho, Choong Rae, Lee, June Key, Park, Youngsoo, Lee, Kyu Mann, Song, Yoon … Materials Research Society	10 Conference Proceedings PHOTO-INDUCED STORAGE AND IMPRINTING IN (Pb, La)(Zr, Ti)O3 THIN FILMS Dimos D., Warren L. W., Tuttle A. B. Kluwer Academic Publishers
5 Conference Proceedings Screen-Printed Pb(Zr, Ti)O3 Thick Films for Ultrasonic Medical Imaging Applications Kosec, Marija, Holc, Janez, Levassort, Franck, Tran-Huu-Hue, Louis Paccal, Lethiecq, Marc IMAPS	11 Conference Proceedings Electrochemical Potential Gradients in Pb(Zr,Ti)O3 Thin Films Brazier, M., Mansour, S., McElfresh, M. MRS - Materials Research Society
6 Conference Proceedings *Characteristics and applications of Sr-modified ferroelectric Pb(Zr,Ti)O3 thin films Lee, K. B., Ju, B. K., Desu, Seshu B. MRS-Materials Research Society	12 Conference Proceedings Ferroelectric (Pb, Ba)(Zr, Ti) O3 thin films grown by MOCVD Hoffmann-Eifert, S., Puchalla, J., Cattaneo, L., Carella, S., Waser, R. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12