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Silicon Nitride Etching with Severe Topography In Sub-0.25 Micron Technology

Author(s):
Yu, Jie
Liu, WenJun
Yap, ChiewWah
Ng, LiangMoh
Pradeep, Yelehanka R.
Lee, PinHian
Jain, Alok
2 more
Publication title:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-17
Pub. Year:
2001
Page(from):
459
Page(to):
463
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
Language:
English
Call no.:
E23400/200117
Type:
Conference Proceedings

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