Effects Of Focused Ion Beam On ECP Copper
- Author(s):
Zhao, S.P. Koh, L.T. Zhang, D.H. Loh, S.A. Liew, G.M. Li, C.Y. Woo, Y.K. Cheng, C.K. Foo, P.D. - Publication title:
- Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-17
- Pub. Year:
- 2001
- Page(from):
- 123
- Page(to):
- 130
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773508 [1566773504]
- Language:
- English
- Call no.:
- E23400/200117
- Type:
- Conference Proceedings
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