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Surface and Interface Structures of Ultrathin Silicon Oxynitride Films

Author(s):
Takahashi, K.
Inoue, K.
Kato, H.
Tamura, N.
Hikazutani, K.
Sano, S.
Hattori, T.
2 more
Publication title:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-17
Pub. Year:
2001
Page(from):
225
Page(to):
231
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
Language:
English
Call no.:
E23400/200117
Type:
Conference Proceedings

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