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Numerical Simulation of the CVD of SiC Using Different Kinetic Models

Author(s):
Wunder, V.K.
Popovska, N.
Gerhard, H.
Emig, G.
Kadinski, L.
Durst, F.
1 more
Publication title:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-13
Pub. Year:
2001
Page(from):
300
Page(to):
307
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773195 [1566773199]
Language:
English
Call no.:
E23400/200113
Type:
Conference Proceedings

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