Modeling of a Silane LPCVD Process Used for Microelectronics and MEMS Fabrication
- Author(s):
- Publication title:
- Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-13
- Pub. Year:
- 2001
- Page(from):
- 276
- Page(to):
- 283
- Pages:
- 8
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773195 [1566773199]
- Language:
- English
- Call no.:
- E23400/200113
- Type:
- Conference Proceedings
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