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Characterization of Thin Dielectric Layers using the Non-Contact Surface Charge Profiler (SCP) Method

Author(s):
Roman, P.
Lee, D.D.
Wang, J.
Mumbauer, P.
Grant, R.
Tower, J.
Kamieniecki, E.
Lukasiak, L.
Ruzyllo, aud J.
4 more
Publication title:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-13
Pub. date:
2001
Page(from):
207
Page(to):
212
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773195 [1566773199]
Language:
English
Call no.:
E23400/200113
Type:
Conference Proceedings

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