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Experimental and Numerical Study of the CVD of TiO2 using New Titanium Precursors

Author(s):
Leistner, T
Frey, L.
Bauer, A.
Schmidt, C.
Lehmbacher, K.
Haerler, P.
Herrmann, W.
Mesic, E.
Kaufmann, P.
Kudinski, L.
Durst, F.
6 more
Publication title:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-13
Pub. date:
2001
Page(from):
160
Page(to):
167
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773195 [1566773199]
Language:
English
Call no.:
E23400/200113
Type:
Conference Proceedings

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