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The Vertical Replacement-Gate (VRG) MOSFET: A High-Performance, Vertical MOSFET with Lithography-Independent Critical Dimensions

Author(s):
Hergenrother, J.M.
Oh, S.H.
Nigam, T.
Monroe, D.
Klemens, F.P.
Kornblit, A.
Baumann, F.H.
Grazul, J.L.
Johnson, R.W.
King, C.A.
Kleiman, R.N.
6 more
Publication title:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-9
Pub. Year:
2001
Page(from):
381
Page(to):
392
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773157 [1566773156]
Language:
English
Call no.:
E23400/2001-9
Type:
Conference Proceedings

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