Blank Cover Image

High Quality Ultra Thin HfO 2 Gate Stack Prepared by In-Situ RT-MOCVD Process

Author(s):
Lee, S.J.
Luan, H.F.
Bai, W.P.
Lee, C.H.
Clark, B.
Rabents, D.
Myers, L.
Kwang, D.L.
3 more
Publication title:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-9
Pub. date:
2001
Page(from):
231
Page(to):
238
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773157 [1566773156]
Language:
English
Call no.:
E23400/2001-9
Type:
Conference Proceedings

Similar Items:

Lee, S.J., Luan, H.F., Lee, C.H, Senzoki, Y, Roberts, D., Kwong, D.-L.

Electrochemical Society

Osburn, C.M., Han, S.K., Kim, I., Campbell, S.A., Garfunkel, E., Gustafson, T., Hauser, J., King, T.-J., Liu, Q., …

Electrochemical Society

Lee, C.H., Luan, H.F, Bat, W.P., Lee, S.J., Jean, T.S., Roberts, D., Kwong, D.L.

Electrochemical Society

Han, L.K., Kim, J., Wang, H.H., Yan, J., Kwong, D.L.

Electrochemical Society

Luan, H. F., Lee, S. J., Lee, C. H., Mao, A. Y., Vrtis, R., Roberts, D., Kwong, D. L.

MRS - Materials Research Society

Lu, W. -T., Chien, C. -H., Lin, Y. -C., Yang, M. -J., Huang, T.-Y.

Electrochemical Society

Kim, I., Han, S.K., Kiether, W., Lee, S.J., Lee, C.H., Luan, H.F., Luo, Z., Rying, E., Wicaksana, Z.Wang D., Zhu, W., …

Electrochemical Society

Kim, Y.H., Song, S.C., Luan, H.F., Gelpey, J.C., Kepton, A., Levy, S., Bloom, R., Kwong, D.-L.

Electrochemical Society

Bhat, M., Cho, T.H., Yan, J., Han, L.K., Kwong, D.L.

Electrochemical Society

Peterson, J. J., Brown, G. A., Matthews, K., Gutt, J., Gopalan, S., Li, H. -J., Kirsch, P., Barnett, J., Moumen, N., …

Electrochemical Society

Lee, S.J., Luan, H.F., Mao, A., Jeon, T.S., Lee, C.H., Vrtis, R., Roberts, D., Kwong, D.-L.

Electrochemical Society

Fei Gao, S. J. Lee, Rui Li, S. Balakumar, Chih-Hang Tung, Dong-Zhi Chi, Dim-Lee Kwong

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12