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Implant and Anneal Methods for PMOS Gates

Author(s):
Fiory, A.T.
Bourdell, K
Chen, Y.
Ma, Y.
McKinley, J.M.
Lay, P.K.
Koh, H.W.
2 more
Publication title:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-9
Pub. date:
2001
Page(from):
89
Page(to):
96
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773157 [1566773156]
Language:
English
Call no.:
E23400/2001-9
Type:
Conference Proceedings

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