Silicon OxyNitride: A Versatile Material for Integrated Optics Application
- Author(s):
- Publication title:
- Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-7
- Pub. Year:
- 2001
- Page(from):
- 191
- Page(to):
- 205
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773133 [156677313X]
- Language:
- English
- Call no.:
- E23400/2001-7
- Type:
- Conference Proceedings
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