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Processing of Thick Thermal Gate Oxides in Trenchs

Author(s):
Wu, C.T.
Ridley, R.
Dolny, G.
Grebs, T.
Hao, J.
Suliman, S.
Venkataraman, B.
Awadelkarim, O.
Williams, R.
Roman, P.
Ruzyllo, J.
6 more
Publication title:
Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-7
Pub. date:
2001
Page(from):
127
Page(to):
133
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773133 [156677313X]
Language:
English
Call no.:
E23400/2001-7
Type:
Conference Proceedings

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