Environmental, Safety, and Health Benefts and Issues Associated with DI/Ozone Resist Strip Process
- Author(s):
- Burnett, S. ( (International SEMATECH) )
- Worth, W. ( (International SEMATECH) )
- Publication title:
- Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2001-6
- Pub. Year:
- 2001
- Page(from):
- 114
- Page(to):
- 125
- Pages:
- 12
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773126 [1566773121]
- Language:
- English
- Call no.:
- E23400/2001-6
- Type:
- Conference Proceedings
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