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Fully Depleted SIMOX SOI Process Technology for Low Power Digital and RF Device

Author(s):
Itoh, M.
Kawai, Y.
Ito, S.
Yokomizo, K.
Katakura, Y.
Fukuda, Y.
Ichikawa, F.
2 more
Publication title:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-3
Pub. Year:
2001
Page(from):
331
Page(to):
336
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773096 [1566773091]
Language:
English
Call no.:
E23400/2001-3
Type:
Conference Proceedings

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