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Relaxed SiGe On Insulator Fabricated via Wafer Bonding and Layer Transfer: Etch-back and Smart-cut Alternatives

Author(s):
Taraschi, G.
Cheng, Z.-Y.
Currie, M.T.
Leitz, C.W.
Langdo, T.A.
Lee, M.L.
Pitera, A.
Fitzgerald, E.A.
Antoniadis, D.A.
Hoyt, J.L.
5 more
Publication title:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-3
Pub. date:
2001
Page(from):
27
Page(to):
32
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773096 [1566773091]
Language:
English
Call no.:
E23400/2001-3
Type:
Conference Proceedings

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