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Interface Technology for Advanced Gate Dielectrics*

Author(s):
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
Pub. date:
2001
Page(from):
519
Page(to):
533
Pages:
15
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773089 [1566773083]
Language:
English
Call no.:
E23400/2001-2
Type:
Conference Proceedings

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