Blank Cover Image

Thermally Induced Dislocation and Slip Defects in Silicon

Author(s):
Cho, C.R.
Kim, Y.S.
Lee, J.K.
Ko, S.W.
Choi, D.J.
Son, C.B.
Stephens, A.E.
Rozgonyi, G.A.
3 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
Pub. date:
2001
Page(from):
350
Page(to):
358
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773089 [1566773083]
Language:
English
Call no.:
E23400/2001-2
Type:
Conference Proceedings

Similar Items:

Cho, C.R., Noh, K.Y., Lee, D.H., Kim, Y.S., Ko, S.W., Kim, C.W., Kim, D.H., Son, C.B., Kim, S.J., Cho, D.H., Choi, J.J., …

Electrochemical Society

Cho, C.R., Yarykin, N., Rozgonyi, G.A., Zuhr, R.A.

Electrochemical Society

Cho,C.R., Noh,K.Y., Lee,D.H., Kim,Y.S., Ko,S.W., Kim,C.W., Kim,D.H., Son,C.B., Kim,S.J., Cho,D.H., Choi,J.J., Kim,D.J., …

Electrochemical Society, SPIE-The International Society for Optical Engineering

Park, J-G., Kirk, H., Lee, C-S., Lee, H-K., Lee, D-M., Rozgonyi, G.A.

Electrochemical Society

Kim,J.B., Hur,I.B., Jeong,S.H., Son,Y.S., Lee,K.Y., Lee,S.W., Shin,C., Kim,H.S.

SPIE-The International Society for Optical Engineering

Park, J.G., Ushio, S., Takeno, H., Cho, K.-C., Kim, J.-K., Rozgonyi, G.A.

Electrochemical Society

Heo, N.H., Kim, S.B., Cho, S.S., Choi, Y.S., Chai, K.H., Oh, J.M., Lee, H.C.

Trans Tech Publications

Cha,B.C., Choi,S.W., Kim,J.M., Cho,H.J., Sohn,J.M.

SPIE-The International Society for Optical Engineering

Park, J-G., Kirk, H., Cho, K-C., Lee, H-K., Lee, C-S., Rozgonyi, G.A.

Electrochemical Society

Park,J.-G., Jung,J.-K., Cho,K.-C., Rozgonyi,G.A.

Trans Tech Publications

Park, J.-G., Rozgonyi, G.A., Lee, C.-S., Choi, S.-P.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12