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Thermally Induced Dislocation and Slip Defects in Silicon

Author(s):
Cho, C.R.
Kim, Y.S.
Lee, J.K.
Ko, S.W.
Choi, D.J.
Son, C.B.
Stephens, A.E.
Rozgonyi, G.A.
3 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
Pub. Year:
2001
Page(from):
350
Page(to):
358
Pages:
9
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773089 [1566773083]
Language:
English
Call no.:
E23400/2001-2
Type:
Conference Proceedings

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