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L-Shape Spacer Architecture for Low Cost, High Performance CMOS

Author(s):
Augendre, E.
Perello, C.
Vandamme, E.P.
Pochet, S.
Rooyackers, R.
Beckx, S.
De Potter, M.
Lauwers, A.
Badenes, G.
4 more
Publication title:
ULSI Process Integration : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-2
Pub. Year:
2001
Page(from):
297
Page(to):
304
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773089 [1566773083]
Language:
English
Call no.:
E23400/2001-2
Type:
Conference Proceedings

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