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The Chemical-Mechanical Polishing of Copper with Model Slurries

Author(s):
Publication title:
Electrochemical science and technology of copper : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-30
Pub. date:
2000
Page(from):
103
Page(to):
116
Pages:
14
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772976 [1566772974]
Language:
English
Call no.:
E23400/200030
Type:
Conference Proceedings

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