Integrated Ferromagnetic Microsensors and Microactuators
- Author(s):
Judy, J.W. Yang, H. Myung, N.V. Yang, C.-K. Schwartz, M. Nobe, K. - Publication title:
- Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-29
- Pub. Year:
- 2000
- Page(from):
- 456
- Page(to):
- 468
- Pages:
- 13
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772969 [1566772966]
- Language:
- English
- Call no.:
- E23400/200029
- Type:
- Conference Proceedings
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