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Nanometer Trackwidth Definition by E-Beam Lithography for Advanced Magnetic Recording Heads

Author(s):
Publication title:
Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-29
Pub. date:
2000
Page(from):
332
Page(to):
342
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772969 [1566772966]
Language:
English
Call no.:
E23400/200029
Type:
Conference Proceedings

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