Structural Properties of Porous Ultra Low-k Thin Films

Structural Properties of Porous Ultra Low-k Thin Films

Author(s):

Chen, W.

Publication title:

Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-27

Pub. Year:

2000

Page(from):

175

Page(to):

183

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772945 [156677294X]

Language:

English

Call no.:

E23400/200027

Type:

Conference Proceedings

Details

TDL ID:	ZA00013996
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Copper Interconnects, New Contact Metallurgies/Structures, and Low-k Interlevel Dielectrics ; Meeting of the Electrochemical Society
Conf. info. (Number):	2000 ; 198th
Conf. info. (Venue):	Phoenix, AZ, USA
Conf. info. (Date):	2000.10.22-2000.10.27

Similar Items:

1 Conference Proceedings Ultra Low-k Inorganic Silsequioxane Films With Tunable Electrical And Mechanical Properties Deis, T., Saha, C., Moyer, E.S., Chung, K., Lin, Y., Spaulding, M.J., Albaugh, J., Chen, W., Bremmer, J.N. Materials Research Society	7 Conference Proceedings Application of spectroscopic ellipsometry to characterization of optical thin films (Invited Paper) Woollam, J.A., Bungay, C.L., Yan, L., Thompson, D.W., Hilfiker, J.N. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Characterizing Porosity In Nanoporous Thin Films Using Positronium Annihilation Lifetime Spectroscopy Sun, J.N., Gidley, D.W., Hu, Y.F., Frieze, W.E., Yang, S. Materials Research Society	8 Conference Proceedings MORPHOLOGY OF ULTRA-THIN METAL FILMS USING INFRARED REFLECTION ADSORPTION SPECTROSCOPY He, J.-W., Kuhn, W.K., Goodman, D.W. Materials Research Society
3 Conference Proceedings Probing Pore Characteristics In Los-k Thin Films Using Positronium Annihilation Lifetime Spectroscopy Gidley, D.W., Frieze, W.E., Dull, T.L., Sun, J.N., Yee, A.F. Materials Research Society	9 Conference Proceedings Deposition of Potassium Niobate Thin Films by Metalorganic Chemical Vapor Deposition and Their Nonlinear Optical Properties Nystrom, M. J., Wessels, B. W., Chen, J., Studebaker, D., Marks, T. J., Lin, W. P., Wong, G. K. MRS - Materials Research Society
4 Conference Proceedings Structure And Property Characterization Of Porous Low-k Dielectric Constant Thin Films Using X-ray Reflectivity And Small Angle Neutron Scattering Lin, E.K., Wu, W., Jin, C., Wetzel, J.T. Materials Research Society	10 Conference Proceedings Preparation and Properties of Porous Bismuth Films Shen, W-N., Dunn, B., Ragot, F., Goorsky, M. S., Moore, C. D., Chen, G., Gronsky, R., Fuller-Mora, W. W., Gillespie, D. … MRS - Materials Research Society
5 Conference Proceedings Probing Effects of Etching Plasmas on the Properties of Porous Low-k Dielectrics Wang, L., Liu, J., Wang, W.D., Chi, D.Z., Gidley, D.W., Yee, A.F. Materials Research Society	11 Conference Proceedings PROPERTIES OF THIN FILMS OF YBa2Cu3O7 PREPARED BY CO-EVAPORATIN OF Y, Cu, AND BaF2 Raistrick, I.D., Cooke, D.W., Beery, J.G., Garzon, F.H., Javadi, H., Maley, M.P., Rollett, A.D., Roy, T., Sinha, D.N., … Materials Research Society
6 Conference Proceedings A Three-Phase Model For The Structure Of Porous Thin Films Determined By X-ray Reflectivity And Small-Angle Neutron Scattering Wu, W., Lin, E.K., Jin, C., Wetzel, J.T. Materials Research Society	12 Conference Proceedings The Characterization and Preparation of Porous Low Dielectric Films Using Various Cyclodextrins as Template Materials Yim, Jin-Heong, Kim, Jung-Bae, Jeong, Hyun-Dam, Lyu, Yi-Yeoul, Mah, Sang Kook, Hyeon-Lee, Jingyu, Lee, Kwang Hee, Chang, … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12