Copper Electroplating onto Silicon Wafers Using High Frequency Acoustic Streaming
- Author(s):
Suni, I.I. Tiwari, C. Busnaina, A.A. Lin, H. Reynolds., H.V. Neely, C. - Publication title:
- Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-27
- Pub. Year:
- 2000
- Page(from):
- 15
- Page(to):
- 22
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772945 [156677294X]
- Language:
- English
- Call no.:
- E23400/200027
- Type:
- Conference Proceedings
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