Light Scattering Study of Roughness and Dishing on Post-CMP Wafers
- Author(s):
- Publication title:
- Chemical Mechanical Planarization : proceedings of the International Symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-26
- Pub. Year:
- 2000
- Page(from):
- 56
- Page(to):
- 74
- Pages:
- 19
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772938 [1566772931]
- Language:
- English
- Call no.:
- E23400/200026
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Defect characterization and light scattering by PSI spheres on tungsten CMP wafers
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Analytical first-order model of light scattering from submicron pyramidal pits
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Prediction of light scattering from particles on a filmed surface using discrete-dipole approximation
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Biophysical modeling of time-resolved forward scattering by Listeria colonies [6381-09]
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Diffuse X-ray Scattering Study of Defects Created by keV Ion Implants in Si
MRS - Materials Research Society |
5
Conference Proceedings
Prediction of light scattering characteristics of particles and structures on surfaces by the coupled-dipole method
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Diffuse X-ray Scattering Study of Defects Created by keV Ion Implants in Si
MRS - Materials Research Society |
6
Conference Proceedings
Identification and characterization of bacteria on surfaces using light scattering
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Development and optimization of two-dimensional centering algorithm for bacterial rapid detection system using forward scattering
Society of Photo-optical Instrumentation Engineers |