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ELTRAN(R); SOI-Epi WaferTM by Epitaxial Layer Transfer from Porous Si

Author(s):
Publication title:
Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-25
Pub. date:
2000
Page(from):
313
Page(to):
317
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772921 [1566772923]
Language:
English
Call no.:
E23400/200025
Type:
Conference Proceedings

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