Electron-Beam Induced Nanomasking for Metal Electrodeposition on Semiconductor Surfaces

Electron-Beam Induced Nanomasking for Metal Electrodeposition on Semiconductor Surfaces

Author(s):

Publication title:

Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-25

Pub. Year:

2000

Page(from):

200

Page(to):

211

Pages:

12

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772921 [1566772923]

Language:

English

Call no.:

E23400/200025

Type:

Conference Proceedings

Details

TDL ID:	ZA00013994
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Pits and Pores ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 198th
Conf. info. (Venue):	Phoenix, AZ, USA
Conf. info. (Date):	2000.10.22-2000.10.27

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