Fabrication and Materials Characterization of Pulsed Laser Deposited Nickel Suicide Ohmic Contacts to 4H n-SiC

Fabrication and Materials Characterization of Pulsed Laser Deposited Nickel Suicide Ohmic Contacts to 4H n-SiC

Author(s):

Cole, M.W.

Publication title:

High Speed Compound Semiconductor Devices for Wireless Applications and State-of-the-Art Program on Compound Semiconductors (XXXIII) : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-18

Pub. Year:

2000

Page(from):

198

Page(to):

209

Pages:

12

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772853 [1566772850]

Language:

English

Call no.:

E23400/200018

Type:

Conference Proceedings

Details

TDL ID:	ZA00013987
Series ID:	PA00000028
Conf. info. (Name):	State-of-the-art Program on Compound Semiconductors - SOTAPOCS ; High Speed Compound Semiconductor Devices for Wireless Applications Symposia ; Meeting of the Electrochemical Society
Conf. info. (Number):	33rd ; 2nd ; 198th
Conf. info. (Venue):	Phoenix, Arizona, USA
Conf. info. (Date):	2000.10.22-2000.10.27

Similar Items:

1 Conference Proceedings Optimization Of The Processing Parameters For Pulsed Laser Deposition Of Nickel Silicide Ohmic Contacts On SiC Richardson, C.J.K., Wisnioski, M.H., Spicer, J.B., Demaree, J.D., Cole, M.W., Hubbard, C.W., Joshi, P.C., Hirvonen, … Materials Research Society	7 Conference Proceedings The Materials Properties Of A Nickel Based Composite Contact To n-SiC For Pulsed Power Switching Cole, Melanie W., Joshi, P.C., Ren, F., Hubbard, C.W., Wood, M.C., Ervin, M.H. Materials Research Society
2 Conference Proceedings A Novel Direct Pulse Laser Deposited Nickel Silicide Ohmic Contact to n-SiC Cole, M.W., Joshi, P.C., Hubbard, C.W., Ngo, E., Demaree, J.D., Hirvonen, J.K., Wood, M.C., Ervin, M.H. Materials Research Society	8 Conference Proceedings Correlation Of Microwave Dielectric Properties And Microstructure Of Unpatterned Ferro electric Thin Films Geyer, R.G., Cole, M.W., Joshi, P.C., Ngo, E., Hubbard, C., Nothwang, W., Bratcher, M., Ervin, M., Wood, M. Materials Research Society
3 Conference Proceedings Formation and Thermal Stability of Ni/Wsi/Ti/Pt Composite Ohmic Contacts to n-SiC for High Power Device Applications Cole, M.W., Joshi, P.C., Hubbard, C.W., Demaree, D.J., Wood, M.C., Ervin, M.H., Ren, F. Electrochemical Society	9 Conference Proceedings Al Doped Ta2O5 Thin Films for Microelectronic Applications Joshi, P.C., Cole, M.W., Hubbard, C.W., Ngo, E. Materials Research Society
4 Conference Proceedings Thermal Stability of Ni-Based Ohmic Contacts to n-SiC for High Temperature And Pulsed Power Device Applications* Cole, M.W., Joshi, P.C., Hubbard, C., Demaree., J.D., Ervin, M. Electrochemical Society	10 Conference Proceedings Electrophoretic Deposition of Ferroelectric Composites for Applications in Electronic Scanning Systems Ngo, E., Joshi, P.C., Cole, M.W., Hubbard, C.W. Materials Research Society
5 Conference Proceedings The Effects of Mg Doping on the Materials and Dielectric Properties of Ba1-xSrxTiO3 Thin Films Cole, M.W., Joshi, P.C., Pfeffer, R.L., Hubbard, C.W., Ngo, E., Ervin, M.H., Wood, M.C. Materials Research Society	11 Conference Proceedings Thermal Behavior of Ni Ohmic Contacts to n-SiC: A Materials and Electrical Reliability Investigation Cole, M.W., Hubbard, C., Demaree, D., Fountzzoulas, C.G., Natarajan, A., Miller, R.A., Harris, D., Xie, K., Searson, P. Electrochemical Society
6 Conference Proceedings Microstructural and Electrical Properties of La Doped Ba1-xSrxTiO3 Thin Films For Tunable Microwave Device Applications Cole, M.W., Joshi, P.C., Ngo, E., Hubbard, C.W., Lee, U., Ervin, M.H. Materials Research Society	12 Conference Proceedings Novel Dielectric Thin Films for Frequency Agile Microwave Devices Cole, M.W., Nothwang, W., Hubbard, C., Ngo, E., Ervin, M., Geyer, R.G. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12