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Resonance Ultrasonic Diagnostics of As-Grown and Process-Induced Defects in Cz Silicon

Author(s):
Belyaev, A.
Tarasov, I.
Ostapenko, S.
Koveshnikov, S.
Kochelap, V.A.
Beyaev, A.E.
1 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. Year:
2000
Page(from):
660
Page(to):
669
Pages:
10
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

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