Blank Cover Image

Gate oxide Integrity Response as a Function of Near the Surface Crystal Defects Morphology

Author(s):
Borionetti, G.
Godio, P.
Bonoli, F.
Comara, M.
Orizio, R.
Falster, R.
1 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. Year:
2000
Page(from):
456
Page(to):
466
Pages:
11
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

Similar Items:

Borionetti,G., Godio,P., Bonoli,F., Cornara,M., Orizio,R., Falster,R.

Electrochemical Society, SPIE-The International Society for Optical Engineering

Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., …

Electrochemical Society

Borionetti, G., Godio, P., Porrini, M., Ilic, S.

Electrochemical Society

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society

Corradi, A., Borzoni, E., Godio, P., Borionetti, G.

MRS - Materials Research Society

Bearda, T., Mertens, P.W., Woerlee, P.H., Wallinga, H., Sebmolke, R., Heyns, M.

Electrochemical Society

Borionetti, G., Porrini, M., Geranzani, P., Orizio, R., Falster, R.

Electrochemical Society

Coteau,M.D.de, Wilshaw,P.R., Falster,R.

Trans Tech Publications

Rozgonyi, G., Tamatsuka, M., Bae, K.-M., Gonzales, F.

Electrochemical Society

Sano, M., Hourai, M., Sumita, S., Shigematsu, T.

Electrochemical Society

Lorenzi, G., Nguyen, K.H., Sanna, C., Orizio, R., Borionetti, G.

SPIE-The International Society for Optical Engineering

Borionetti, G., Falster, R., Bertolini, S., Cornara, M., Olmo, M., Chalmers, G., Childs, R., Marcuccilli, G.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12