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Epitaxial Layer Lifetime Characterization in the Frequency Domain

Author(s):
Park, J.E.
Schroder, D.K.
Tan, SE.
Choi, B.D.
Fletcher, M.
Buczkowski, A.
Kirscht, F.
2 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. date:
2000
Page(from):
383
Page(to):
395
Pages:
13
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

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