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Bulk and Surface Properties of Cz Silicon After Hydrogen Plasma

Author(s):
Job, R.
Ulyashin, AG.
Fahrner, W.R.
Markevich, V.P.
Murin, LI.
LindstrtSm, J.L.
Raiko, V.
Engemann, J.
3 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. date:
2000
Page(from):
209
Page(to):
222
Pages:
14
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

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