Blank Cover Image

Nucleation of Void Defects in Cz Silicon

Author(s):
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. Year:
2000
Page(from):
77
Page(to):
85
Pages:
9
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Nucleation of Void Defects in Cz Silicon

Yamanaka,Y., Tanahashi,K., Mikayama,T., Inoue,N., Mori,A.

Electrochemical Society, SPIE-The International Society for Optical Engineering
7 Conference Proceedings Segregation of Nitrogen in Cz Silicon

Inoue, N.

Electrochemical Society
2 Conference Proceedings Valence Force Field Analysis of Nitrogen in Silicon

Harada, H., Tanahashi, K., Koukitsu, A., Mikayama, T., Inoue, N.

Electrochemical Society
8 Conference Proceedings Standardization of Measurement of Nitrogen Concentration in CZ Silicon Crystals

N. Inoue, A. Karen, H. Yagi, K. Masumoto, M. Shinomiya, K. Kashima, K. Eifuku, M. Koizumi, T. Takahashi, T. Takenawa, K. …

Electrochemical Society
3 Conference Proceedings Valence Force Field Analysis of Nitrogen in Silicon

Harada,H., Tanahashi,K., Koukitsu,A., Mikayama,T., Inoue,N.

Electrochemical Society, SPIE-The International Society for Optical Engineering
9 Conference Proceedings INVITED: MEASUREMENT OF NITROGEN CONTENTRATION IN CZ SILICON

Inoue, N., Shingu, K., Masumoto, K.

Electrochemical Society
4 Conference Proceedings Behavior of Point Defects in CZ Silicon Crystal Growth - Formation of Polyhedral Cavities and Oxidation-Induced Stacking Fault Nuclei

Tanahashi, K., Inoue, N., Mizokawa, Y.

MRS - Materials Research Society
10 Conference Proceedings INVITED: MEASUREMENT OF NITROGEN CONTENTRATION IN CZ SILICON

Inoue, N., Shingu, K., Masumoto, K.

Electrochemical Society
5 Conference Proceedings Point Defect Generation by the Stress Due to Impurity Doping in Silicon Crystal

Kikuchi, M., Tanahashi, K., Inoue, N.

Electrochemical Society
11 Conference Proceedings Nucleation and Growth of Voids in Silicon

Plekhanov, P. S., Gosele, U. M., Tan, T. Y.

MRS - Materials Research Society
6 Conference Proceedings Impact of Defects in Silicon Substrate on Flash Memory Characteristics

T. Hirano, K. Yamazaki, F. Inoue, K. Imooka, K. Tanahashi, H. Yamada-Kaneta

Electrochemical Society
12 Conference Proceedings Nitrogen Concentration Measurement of CZ Silicon

Inoue, N., Fujiyama, N., Yagi, H.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12