Blank Cover Image

Diagnostics of Metalorganic Chemical Vapor Deposition of (Ba, Sr)TiO3 Films by Microdischarge Optical Emission Spectroscopy

Author(s):
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. Year:
2000
Page(from):
740
Page(to):
747
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Infrared Spectroscopic Study on Metalorganic Chemical Vapor Deposition of (Ba, Sr)TiO3 Films

Nakamura, T., Nishimura, T., Momose, S., Tachibana, K.

Electrochemical Society
7 Conference Proceedings Chemical Vapor Deposition Technology of (Ba,Sr)TiO3 Thin Films for Gbit-Scale Dynamic Random Access Memories

Horikawa, T., Tarutani, M., Kawahara, T., Yamamuka, M., Hirano, N., Sato, T., Matsuno, S., Shibano, T., Uchikawa, F., …

MRS - Materials Research Society
2 Conference Proceedings In-situ infrared spectroscopic study on a manganese precursor in metalorganic chemical vapor deposition

Nakamura, T., Tai, R., Nishimum, T., Tachibana, K.

Electrochemical Society
8 Conference Proceedings PREPARATION OF Ba1-xSrxTiO3 THIN FILMS BY METALORGANIC CHEMICAL VAPOR DEPOSITION AND THEIR PROPERTIES

Gilbert, S. R., Wessels, B. W., Neumayer, D. A., Marks, T. J., Schindler, J. L., Kannewurf, C. R.

MRS - Materials Research Society
3 Conference Proceedings Organometallic Chemical Vapor Deposition of (BaSr)TiO3 Ferroelectric Thin Films

Wessels, B.W., Wills, L.A., Lu, H.A., Gilbert, S.R., Neumayer, D.A., Schulz, D.L., Marks, T.J.

Electrochemical Society
9 Conference Proceedings Photoreflectance Study of GaN Film Grown by Metalorganic Chemical Vapor Deposition

Yang, K., Zhang, R., Zheng, Y. D., Qin, L. H., Shen, B., Shi, H. T., Huang, Z. C., Chen, J. C.

MRS - Materials Research Society
4 Conference Proceedings *Chemical vapor deposition and electrode technologies for (Ba,Sr) TiO3 capacitor used in gigabit DRAM

Eguchi, K., Hieda, K., Nakahira, J., Kiyotoshi, M., Nakabayashi, M., Yamazaki, S., Izuha, M., Aoyama, T., Tsunoda, K., …

MRS-Materials Research Society
10 Conference Proceedings Growth of High Quality InGaN Films by Metalorganic Chemical Vapor Deposition

Roberts, J. C., McIntosh, F. G., Boutros, K. S., Bedair, S. M., Moussa, M., Piner, E. L., He, Y., El-Masry, N. A.

MRS - Materials Research Society
5 Conference Proceedings Growth of deep-UV light-emitting diodes by metalorganic chemical vapor deposition

Yasan, A., McClintock, R., Mayes, K., Shiell, D., Darvish, S.R., Kung, P., Razeghi, M.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Surface and Interface Properties of InSb Epitaxial Thin Films Grown on GaAs by Low-Pressure Metalorganic Chemical Vapor Deposition

Li, K., Tan, K. L., Pelczynski, M., Feng, Z. C., Wee, A. T. S., Lin, J. Y., Ferguson, I., Stall, R. A.

MRS - Materials Research Society
6 Conference Proceedings Deposition of Potassium Niobate Thin Films by Metalorganic Chemical Vapor Deposition and Their Nonlinear Optical Properties

Nystrom, M. J., Wessels, B. W., Chen, J., Studebaker, D., Marks, T. J., Lin, W. P., Wong, G. K.

MRS - Materials Research Society
12 Conference Proceedings Structural and optical properties of GaN materials grown on Si by metalorganic chemical vapor deposition

Chen,J.L., Feng,Z.C., Zhang,X., Chua,S.J., Hou,Y.T., Lin,J.

SPIE - The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12