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Quality Improvement of SiO2-Films by Adding Foreign Gases in Photo-Chemical Vapor Deposition

Author(s):
Maroyama, Y.
Miyano, J.-I.
Yokoyama, T
Toshikawa, K.
Mori, T.
Murata, H.
kurosawa, K.
yokotani, A.
Sasaki, W.
4 more
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. Year:
2000
Page(from):
605
Page(to):
609
Pages:
5
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

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